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COATING  EQUIPMENTS














              高致密金属膜                                                                                                                                                                           低温氮 / 碳化合物膜




              高致密金属膜层的性能和应用                                                                                                                                                           低温氮化物和碳化物膜层的性能和应用
              TABLE 4 : HIGH DENSITY METAL /ALLOY FILMS ’ PROPERTIES AND APPLICATIONS                                                                                 TABLE 5 : LOW-TEMP. NITRIDE AND CARBIDE FILMS ' PROPERTIES AND APPLICATIONS














              高致密金属膜种类 :Pt, Ti, Cr, Au, Cu, Ni 和合金等。





              FILM PROPERTIES/ 膜层性能
                                                                                                                                                                                                      FILM PROPERTIES/ 膜层性能

              高纯度 / High Purity;
                                                                                                                                                                                                Suitable for Insulators Coating / 适合镀膜绝缘体;
              超硬 / Super-Hard;
                                                                                                                                                                                                           Low  Deposition Temp. / 低温镀膜;
              粘附性好 / Good Adhesion;
                                                                                                                                                                                                             Thermal Stress Free / 无热应力;
              均匀性好 / Good Uniformity;
                                                                                                                                                                                                                    Super-Hard / 硬度高;
              耐磨损 / Wear-Resistant;
                                                                                                                                                                                                                  Wear-Resistant / 耐磨损;
              镀膜温度低 / Low Deposition Temp.;
                                                                                                                                                                                                        Low Friction Coefficient / 摩擦系数小;
              无热应力 / Thermal Stress Free;
                                                                                                                                                                                                                Scratch-Resistant / 防刮花;
              高致密 / High Density;
                                                                                                                                                                                                               Corrosion-Resistant / 耐腐蚀;
              更耐腐蚀 / Corrosion-Resistant;
                                                                                                                                                                                                                   High Density / 高致密;
              导电性高 / High Electrical Conductivity;
                                                                                                                                                                                                              Good  Uniformity / 均匀性好;
              无颗粒 / Particle-Free;
                                                                                                                                                                                                               Good  Adhesion / 粘附性好;
              摩擦系数小 / Low Friction Coefficient;
                                                                                                                                                                                                     High  Thermal Conductivity, etc / 高热导等  b
              高热导等 / High Thermal Conductivity, etc.






        13   CHUNYUAN                                                                                                                                                                                                        14  CHUNYUAN
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