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COATING EQUIPMENTS
高致密金属膜 低温氮 / 碳化合物膜
高致密金属膜层的性能和应用 低温氮化物和碳化物膜层的性能和应用
TABLE 4 : HIGH DENSITY METAL /ALLOY FILMS ’ PROPERTIES AND APPLICATIONS TABLE 5 : LOW-TEMP. NITRIDE AND CARBIDE FILMS ' PROPERTIES AND APPLICATIONS
高致密金属膜种类 :Pt, Ti, Cr, Au, Cu, Ni 和合金等。
FILM PROPERTIES/ 膜层性能
FILM PROPERTIES/ 膜层性能
高纯度 / High Purity;
Suitable for Insulators Coating / 适合镀膜绝缘体;
超硬 / Super-Hard;
Low Deposition Temp. / 低温镀膜;
粘附性好 / Good Adhesion;
Thermal Stress Free / 无热应力;
均匀性好 / Good Uniformity;
Super-Hard / 硬度高;
耐磨损 / Wear-Resistant;
Wear-Resistant / 耐磨损;
镀膜温度低 / Low Deposition Temp.;
Low Friction Coefficient / 摩擦系数小;
无热应力 / Thermal Stress Free;
Scratch-Resistant / 防刮花;
高致密 / High Density;
Corrosion-Resistant / 耐腐蚀;
更耐腐蚀 / Corrosion-Resistant;
High Density / 高致密;
导电性高 / High Electrical Conductivity;
Good Uniformity / 均匀性好;
无颗粒 / Particle-Free;
Good Adhesion / 粘附性好;
摩擦系数小 / Low Friction Coefficient;
High Thermal Conductivity, etc / 高热导等 b
高热导等 / High Thermal Conductivity, etc.
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